NVC830.3 Vacuum Control Series for Semiconductor Wafers
Achieves high pump performance in a compact size. Supports wafer manufacturing.
In the semiconductor industry, particularly in wafer manufacturing, precise control of the vacuum environment is a crucial factor that affects product quality and yield. To prevent foreign matter from adhering to the wafer surface and to ensure uniform processing, it is essential to maintain a stable vacuum level. If the vacuum level is unstable, it can lead to deterioration in wafer quality and delays in the manufacturing process. The NVC830.3 series achieves precise control of the vacuum environment in the wafer manufacturing process through closed-loop vacuum control, ensuring stable quality and high productivity. 【Usage Scenarios】 - Wafer transport - Etching process - Film deposition process 【Benefits of Implementation】 - Improved yield through stabilization of vacuum levels - Increased productivity through process optimization - Enhanced product quality
- Company：ケーエヌエフ・ジャパン KNF JAPAN
- Price：100,000 yen-500,000 yen
